An experimental comparison of PI, inversion, and damping control for high performance nanopositioning

Title: An experimental comparison of PI, inversion, and damping control for high performance nanopositioning
Creator: Fleming, Andrew J.; Leang, Kam K.
Relation: 2013 American Control Conference (ACC). Proceedings of the 2013 American Control Conference (Washington, DC 17-19 June, 2013) p. 6027-6032
Publisher Link: http://dx.doi.org/10.1109/ACC.2013.6580782
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2013
Description: This article compares the performance of three feedback control methodologies for high performance nanopositioning applications. Integral resonance damping control is a new approach for controlling mechanical systems. In this approach, the system resonances are actively damped rather than inverted which maximizes the closed-loop bandwidth and provides robustness to changes in the resonance frequencies. This technique is comprehensively compared to the standard methods of PI and inversion control in a practical environment. A five times improvement in the settling-time and bandwidth is demonstrated.
Subject: bandwidth; damping; frequency control; gain; load modeling; nanopositioning; resonant frequency
Identifier: http://hdl.handle.net/1959.13/1063030
Identifier: uon:17190
Identifier: ISBN:9781479901777
Language: eng
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